OPTICAL WAVEGUIDE WITH EMBEDDED LIGHT-REFLECTING FEATURE AND METHOD FOR FABRICATING THE SAME
Abstract(summary):
The invention is directed to a method for fabricating an optical waveguide (100). Basically, it relies on setting on the lower cladding(11), both the waveguide cores (26L–48l) and light-reflecting features (23 –23c), e.g. mirrors or fiducial markers. The reflecting features and the waveguide cores constitute a core layer having an open structure. An upper cladding polymer (31) is then applied, which embeds the light-reflecting features and the waveguides. Thus, the upper cladding applied fills the space left vacant by the open structures. The components of the core layer are accordingly set in place during the fabrication process, before filling the cladding at the level at which they are located. Since the light reflecting features and waveguide cores can be set with high accuracy on the lower cladding (before applying the upper cladding), the problems of reworking (e.g. dicing) or refining position of a light-reflecting feature inserted a posteriori is circumvented. Advantageously, both the waveguide cores and reflecting feature scan be patterned onto the lower cladding. The reflecting features may further be obtained from a selective metallization process.
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