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Effects of working pressure on structure and properties of Al-containing amorphous carbon films prepared by high-power impulse magnetron sputtering

Author:
Peng, Ya-Li  Guo, Chao-Qian  Lin, Song-Sheng  Shi, Qian  Wei, Chun-Bei  Su, Yi-Fan  Wu, Yi-Qian  Tang, Peng  Zhu, Xia-Gao  Dai, Ming-Jiang    


Journal:
Journal of Alloys and Compounds


Issue Date:
2020


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