Silicon photonics co-integrated with silicon nitride for optical phased arrays

Author:

Marinins, Aleksandrs  Dwivedi, Sarvagya P.  Kjellman, Jon O.  Kerman, Sarp  David, Tangla  Figeys, Bruno  Jansen, Roelof  Tezcan, Deniz S.  Rottenberg, Xavier  Soussan, Philippe  

Journal:

JAPANESE JOURNAL OF APPLIED PHYSICS

Issue Date:

2020

Abstract(summary):

In the current work we present Si and SiN combined photonic built-up for optical phased arrays (OPAs) and other large area photonic integrated circuits. We report low-loss co-integrated SIN waveguides and nearly lossless vertical transitions between Si and SiN layers, as well as efficient Si thermo-optical phase shifter module. OPA consisting of 64 optical antennas forming highly collimated beam with 0.4 degrees x 0.47 degrees divergence is, reported. By changing input wavelength, solid-state beam steering of 0 degrees-10 degrees is achieved. (C) 2020 The Japan Society of Applied Physics