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Development of a resonant asymmetric micro mirror using an electro active polymer actuation

Author:
Casset, F.  Poncet, P.  Desloges, B.  Neff, B.  Dos Santos, F. Domingues  Danel, J. S.  Vimercati, M.  Zanotti, L.  Fanget, S.  


Journal:
28TH MICROMECHANICS AND MICROSYSTEMS EUROPE WORKSHOP


Issue Date:
2017


Abstract(summary):

In this paper we present the development of a resonant asymmetric micro mirror. In particular, we prove the possibility of using an Electro Active Polymer as actuation material. The working principle of the micro mirror and the design retained is first presented. Then the technological realization is summarized. We obtain micro mirror demonstrators and the first characterization results are given. These first promising results open the way of low cost and low temperature process actuators for Micro Electro Mechanical Systems.


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