Creat membership Creat membership
Sign in

Forgot password?

Confirm
  • Forgot password?
    Sign Up
  • Confirm
    Sign In
Creat membership Creat membership
Sign in

Forgot password?

Confirm
  • Forgot password?
    Sign Up
  • Confirm
    Sign In
Collection
For ¥0.57 per day, unlimited downloads CREATE MEMBERSHIP Download

toTop

If you have any feedback, Please follow the official account to submit feedback.

Turn on your phone and scan

home > search >

Simulation, Microfabrication, and Control of a Microheater Array

Author:
Zheng, C.  Balasubramanian, G. P. S.  Tan, Y.  Maniatty, A. M.  Hull, R.  Wen, J. T.  


Journal:
IEEE-ASME TRANSACTIONS ON MECHATRONICS


Issue Date:
2017


Abstract(summary):

This paper describes the simulation, fabrication, and feedback control of a microheater array designed for the implementation of real-time control during thermal evolution of microstructure. The ten-channel heating array was designed through finite element simulation and microfabricated to be compatible with in situ imaging in a scanning electronmicroscope. Control algorithms are implemented that demonstrate cooperative control of the temperature (using calibrated Ti heater line resistances as a proxy) across the set of channels in the array. The goal of this system is to be able to generate controlled thermal, and thus microstructural, and property distribution during processing of polycrystalline materials.


Page:
1914---1919


VIEW PDF

The preview is over

If you wish to continue, please create your membership or download this.

Create Membership

Similar Literature

Submit Feedback

This function is a member function, members do not limit the number of downloads