Properties of W/DLC/W–S–C composite films fabricated by magnetron sputtering

Author:

Ming-jiang DAI  Chun-bei WEI  Ke-song ZHOU  Min ZHU  Hui-jun HOU  Song-sheng LIN  Xin TONG  

Journal:

Transactions of Nonferrous Metals Society of China

Issue Date:

2015

Abstract(summary):

Abstract A kind of W/DLC/W–S–C composite film was fabricated by magnetron sputtering method. Effects of WS x content on the structure and the adhesion of the composite films were investigated. In addition, tribological behavior of the composite films was studied in the conditions of the ambient air and N 2 gas atmosphere by ball-on-disk tester. The results indicate that the composite films show dense and amorphous microstructure. The WC x and WS x compounds are found in amorphous diamond like carbon matrix in the top layers of W–S–C. A proper WS x content is beneficial for improving the adhesion of the composite films. In air atmosphere, the composite films with high C content have better wear resistance and the friction coefficients range from 0.15 to 0.25. In N 2 condition, high WS x content is benefit for the wear resistance and the friction coefficients of the composite films range from 0.03 to 0.1.

Page:

3002-3002