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Thermal stability of Zr-O-N(:Ti) thin films prepared by magnetron sputtering

Author:
da Silva-Oliveira, C.I.   Martínez-Martínez, D.   Apreutesei, M.   Rampelberg, G.   Detavernier, C.   Cunha, L.  


Journal:
Vacuum


Issue Date:
2018


Page:
S0042207X17317220


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