Japanese Journal of Applied Physics, Part 2 (Letters)
Issue Date:
2005
Abstract(summary):
Ferroelectric Ru/Bi 4-xLa xTi 3O 12/Ru capacitors were fabricated by combining metalorganic chemical vapor deposition (MOCVD) of top and bottom Ru electrodes and spin-coating of the ferroelectric film. After optimization of the deposition conditions, good ferroelectric properties (2P r=18muC/cm 2, P r: remanent polarization) and low leakage current density (2times10 -6 A/cm 2) were achieved. No significant fatigue phenomenon (decrease of P r) was observed even after 10 10 switching cycles
Page:
L378---L380L380
Related
Batch download
Cited By
noting
Similar Literature
Submit Feedback
Please wait while the file you selected is being converted