The theory of a Sigma-Delta modulator is introduced in this paper. Based on this theory, a feedback 2-1-1 multi-stage-noise-shaping (MASH) sigma-delta modulator is designed, and the coefficients of the modulator are calculated. The system-level simulation results show that the effective number of bits (ENOB) is 24 bits when the signal bandwidth is 1 kHz and the over-sampling (OSR) rate is 128. Then the circuits of modulator are designed, including integrator, comparator, multi-phase clock and the noise cancelling logic. The whole modulator is simulated in Cadence, the signal to noise ratio (SNR) of the modulator is 125.4dB, and the ENOB is 21.1bits, which meet the technical requirements of the sensor.
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311-316
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