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Growth and processing of heteroepitaxial 3C-SiC films for electronic devices applications

Author:
Severino, A.   Mauceri, M.   Anzalone, R.   Canino, A.   Piluso, N.   Vecchio, C.   Camarda, M.   Via, F.La  


Journal:
MRS Proceedings


Issue Date:
2012


Abstract(summary):

http://www.journals.cambridge.org/abstract_S1946427412010342


Page:
mrss12-1433-h05-01


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