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Tribological Properties of the ZrN Coatings by DC Magnetron Sputtering

Author:
Liu, Chien Cheng   Liu, Kuang I   Lin, Hao Tung   Chou, Yung Chih   Cheng, Yung Mao   Lin, Chih Lung  


Journal:
Applied Mechanics and Materials


Issue Date:
2014


Abstract(summary):

ZrN thin films were successfully deposited by DC magnetron sputtering on die steel substrates. The objective of this study was to investigate heat treatment on the microstructure, morphology, nano-hardness properties determined by X-ray diffraction, field-emission scanning electron microscope (FE-SEM), nanoindentation, and pin-on-disk, respectively. The XRD result shows that ZrN has intensity of (111) and (200) peak after 400 degC for 1 h at lower nitrogen flow rates. The surface of coatings revealed smaller grains and smooth surface under heat treatment. ZrN coatings consisted of lower nitrogen flow rate had much lower friction coefficient, better mechanical properties by annealing treatment process.


Page:
67-70


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