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On-chip intra- and inter-layer grating couplers for three-dimensional integration of silicon photonics

Author:
Zhang, Yang   Kwong, David   Xu, Xiaochuan   Hosseini, Amir   Yang, Sang Y.   Rogers, John A.   Chen, Ray T.  


Journal:
Applied Physics Letters


Issue Date:
2013


Abstract(summary):

We present on-chip intra- and inter-layer grating couplers fabricated on double-layer, single crystalline silicon nanomembranes. The silicon nanomembranes were fabricated using an adhesive bonding process. The grating couplers are based on subwavelength nanostructures operating at the transverse-electric polarization. Such nanostructures can be patterned in a single lithography/etching process. Simultaneous intra-layer coupling to separate silicon photonic layers is demonstrated through grating couplers with peak efficiencies of 18% and 44% per grating coupler for bottom and top layer, respectively, at 1550 nm wavelength. The inter-layer grating coupler has an efficiency of 25% at 1560 nm wavelength with a 3 dB bandwidth of 41 nm.


Page:
211109


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