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Electrical properties of anatase TiO2 films by atomic layer deposition and low annealing temperature

Author:
Nabatame, Toshihide   Ohi, Akihiko   Chikyo, Toyohiro   Kimura, Masayuki   Yamada, Hiroyuki   Ohishi, Tomoji  


Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures


Issue Date:
2014


Abstract(summary):

http://scitation.aip.org/content/avs/journal/jvstb/32/3/10.1116/1.4869059


Page:
03D121


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