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Method for the automated creation of panoramic SPM images

Author:
S. E. Dogadin   S. I. Leesment   O. V. Karban’  


Journal:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques


Issue Date:
2013


Abstract(summary):

A method for the creation of scanning patterns obtained by scanning probe microscopy (SPM) has been proposed. The algorithm allows scanning patterns to be formed when the values of the distortions along the z-axis are minimized and the shapes and sizes of the objects remain unchanged. To remove interline jumps the method of preliminary data filtering is based on a formalized choice of the height range which allows us to increase the automation degree of data processing and the reliability of the data. Model SPM patterns were used for testing.


Page:
154-160


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