Creat membership Creat membership
Sign in

Forgot password?

Confirm
  • Forgot password?
    Sign Up
  • Confirm
    Sign In
Creat membership Creat membership
Sign in

Forgot password?

Confirm
  • Forgot password?
    Sign Up
  • Confirm
    Sign In
Collection

toTop

If you have any feedback, Please follow the official account to submit feedback.

Turn on your phone and scan

home > search >

Angular resolved energy distributions of sputtered atoms at low bombarding energy

Author:
A. Goehlich   D. Gillmann   H.F. D?bele  


Journal:
Nuclear Instruments & Methods in Physics Research, Section B (Beam Interactions with Materials and Atoms)


Issue Date:
2000


Abstract(summary):

In this contribution, measurements of energy distributions of sputtered metal atoms (tungsten and aluminum), released from polycrystalline metal targets by bombardment with noble gas ions (argon and xenon, respectively) in the energy range between 150 and 250 eV, are reported. Laser induced fluorescence spectroscopy in connection with a special designed detection geometry is applied to study energy distributions of atoms ejected in selected emission angles. Normal and oblique incidence is investigated. In both cases, systematic changes of the measured energy distribution with the emission angle are observed. The experimental distributions are compared to simulations performed by the Monte-Carlo code TRIM.SP


Page:
834-839


Similar Literature

Submit Feedback

This function is a member function, members do not limit the number of downloads