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SOI structure by N+2 ion implantation into silicon : Li Weizhong, Zhang Jisheng, Lin Yufeng, Wang Yong, Yang Jingming, Luo Yiheng and Li Zhijian, Institute of Micro-electronics, Tsinghua University, Beijing, PROC

Author:
None  


Issue Date:
1989


Abstract(summary):

http://linkinghub.elsevier.com/retrieve/pii/0042207X89902595


Page:
433-0


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