Nanocrystalline TiO2 thin films were synthesized by the sol-gel spin-coating method with different variables. Tetrabutyl titanate (TBOT) proportion and C5H8O2: TBOT molar ratio were confirmed to be influential on the gelation time. X-ray diffraction analysis indicated that the samples presented rutile TiO2 phases, which is a basis for subsequent experiments. Scanning electron microscope results revealed that TiO2 thin films with homogeneous and compact surfaces were synthesized successfully when adding moderate TBOT. It was found the thickness of films could reach about 60 nm when sintered at 750 °C, and the influence of sintering temperature was also investigated.
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