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Novel plasma treatment in linear antenna microwave PECVD system

Author:
Neda Neykovaa   b   neykova@fzu.cz   Halyna Kozaka   Martin Ledinskya   Alexander Kromkaa  


Journal:
Vacuum


Issue Date:
2012


Abstract(summary):

This work reports on hydrogen termination of nano-crystalline diamond films and the behavior of polymer SU-8 as passivating layer after plasma treatment performed at low temperature in a novel linear antenna microwave plasma enhanced system. Nano-crystalline diamond films were grown by microwave plasma enhanced chemical vapor deposition and then hydrogen terminated at different substrate temperatures. The results indicate that a temperature as low as 200?°C is sufficient to reliably attain a diamond surface conductivity of the order of 10??(Ω/??. An increase in substrate temperature up to 400?°C results in an increase in surface conductivity up to 1.7?×?10??(Ω/??. The structural changes of the SU-8 passivating layer, before and after plasma treatment, were investigated by FTIR spectroscopy.


Page:
603-607


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