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Cluster ion–solid interactions from meV to MeV energies

Author:
K. Nordlund   T.T. Järvi   K. Meinander and J. Samela  


Journal:
Applied Physics A: Materials Science & Processing


Issue Date:
2008


Abstract(summary):

The nature of cluster ion–surface interactions changes dramatically with the kinetic energy and mass of the incoming cluster species. In this article we review some recent work on the nature of cluster–surface interactions spanning an energy range from a few tens of meV/atom to several MeV/cluster and cluster sizes in the range of 1–300000 atoms/cluster. We describe five possible distinct outcomes of a single cluster impact event: (i) deposition into a non-epitaxial configuration, (ii) deposition into an epitaxial configuration, (iii) crater formation by liquid flow, (iv) crater formation by hydrostatic pressure, (v) implantation.


Page:
561-566


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