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A Novel Optical Method for Measuring the Thin Film Stress

Author:
Chu, Yen-Chang  Chen, Kun-Huang  Chen, Jing-Heng  Tseng, Hua-Ken  Chang, Yu-Shiang  


Journal:
INTERNATIONAL SYMPOSIUM ON PHOTONICS AND OPTOELECTRONICS 2014


Issue Date:
2014


Abstract(summary):

This paper proposes a thin-film stress measurement system. By applying a constant velocity to the projection grating along the grating plane, a series of sampling points of the sinusoidal wave can be recorded using a CCD camera. The phase distribution of the optimized heterodyne moire signal can be extracted by the least-squares sine fitting algorithm and then the surface profile of the tested flexible substrate can subsequently be acquired. Using polynomial fitting method to depict the cross-section curve of the substrate, estimating the resultant curvature radii of the uncoated and coated substrates, and substituting these two radii into the corrected Stoney formula, the thin-film stress of the flexible substrate can consequently be obtained. This method features high stability and high resolution due to the introduction of the projection moire and heterodyne interferometry.


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