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Development and Characterization of a Piezoelectrically Actuated MEMS Digital Loudspeaker

Author:
Dejaeger, R.  Casset, F.  Desloges, B.  Le Rhun, G.  Robert, P.  Fanget, S.  Leclere, Q.  Ege, K.  Guyader, J-L  


Journal:
26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012


Issue Date:
2012


Abstract(summary):

The MEMS digital loudspeaker consists of a set of acoustic transducers, called speaklets, arranged in a matrix and which operate in a binary manner by emitting short pulses of sound pressure. Using the principle of additivity of pressures in the air, it is possible to reconstruct an audible sound. MEMS technology is particularly well suited to produce the large number of speaklets needed for sound reconstruction quality while maintaining a reasonable size. This paper presents for the first time the modeling, realization and characterizations of a piezoelectric digital loudspeaker based on MEMS technology. Static, dynamic and acoustic measurements are performed and match closely with theoretical results. (C) 2012 Elsevier Ltd....Selection and/or peer-review under responsibility of the Symposium Cracoviense Sp. z.o.o.


Page:
184---187


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