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Holed MEM resonators for high accuracy frequency trimming

Author:
Civet, Y.  Casset, F.  Carpentier, J. F.  Icard, B.  Bustos, J.  Leverd, F.  Mercier, D.  Basrour, S.  


Journal:
EUROSENSORS XXV


Issue Date:
2011


Abstract(summary):

After consistently progress in Micro-Electro-Mechanical (MEM) resonators, Silicon oscillators are finally being. commercialized for time and frequency control applications not requiring huge frequency accuracy. Indeed, they. offer size reduction, potentially low cost and CMOS integration. However, frequency shift because of manufacturing. mismatch is still one of the challenges to address high frequency accuracy applications. We propose a new frequency. compensation method consisting in filling compensation holes smartly localized onto microresonators. This method. enables to decrease the frequency dispersion over a full wafer of only few ppm, regarding to deviation of 1000ppm. (C) 2011 Published by Elsevier Ltd.


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