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Optimal materials and process conditions of functional layers for piezoelectric MEMS process at high temperature

Author:
Lee, Dong-Yeon  Shim, Jaesool  Kim, Tae Song  Park, Jae Hong  


Journal:
MICRO & NANO LETTERS


Issue Date:
2011


Abstract(summary):

Pb(Zr(0.52)Ti(0.48))O(3) (PZT) thick film-based micro-transducers demonstrate excellent piezoelectric performances. However, its powder-based film requires very high sintering temperature to obtain high density and good electromechanical properties of the active film. High processing temperature enables inter-diffusion or reaction between PZT active materials and Si-based substrate to result in device failure via volatilisation of PbO especially over 800 degrees C. Therefore the preventive solution to this problem should be considered in fabricating silicon-based piezoelectric microdevices for the better performance. In this research, compatibility in the interface stability and adhesion between the layers of the overall integrated piezoelectric thick-film devices were thoroughly investigated for the successful application of the process at high temperature. The Pt (or PtO(x))/TiO(2)/SiN(x)/Si substrate represented the best interfacial properties among various combinations of structural substrates, so this structure is highly recommended to integrated piezoelectric thick-film microelectromechanical system devices.


Page:
553---558


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