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Integrated metallic gauge in a piezoelectric cantilever

Author:
Cueff, M.  Delay, E.  Le Rhun, G.  Rey, P.  Perruchot, F.  Suhm, A.  Aid, M.  


Journal:
SENSORS AND ACTUATORS A-PHYSICAL


Issue Date:
2011


Abstract(summary):

In this study, a self-sensitive piezoelectric cantilever with a new design for sensing is presented. Microcantilevers were actuated by a 120 nm-thick Lead Zirconate Titanate Oxide (PZT) layer. Detection was done by measuring the resistance of a metallic gauge integrated on the surface of the micro-piezoelectric cantilevers. Some metallic gauges were embedded in a Wheatstone bridge to improve the measured resistance accuracy. Devices with direct resistance measurement were also realized. Gauge resistance responses were compared with an optical measurement by a White Light Interferometer. By biasing the Pit between 5 V and 5 V. cyclic deflection of the cantilever was detected with both optical and metallic gauge resistance systems. The two measurements fit. This self-sensitive piezoelectric cantilever can be used for fatigue test with packaged devices. (C) 2011 Elsevier B.V. All rights reserved.


Page:
148---153


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