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Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography RID B-9523-2011

Author:
Dumon, P  Bogaerts, W  Wiaux, V  Wouters, J  Beckx, S  Van Campenhout, J  Taillaert, D  Luyssaert, B  Bienstman, P  Van Thourhout, D  Baets, R  


Journal:
IEEE PHOTONICS TECHNOLOGY LETTERS


Issue Date:
2004


Abstract(summary):

We demonstrate single-mode photonic wires in Silicon-on-insulator with propagation loss as low as 2.4 dB/cm, fabricated with deep ultraviolet lithography and dry etching. We have also made compact racetrack and ring resonators functioning as add-drop filters, attaining Q values larger than 3000 and low add-drop crosstalk.


Page:
1328---1330


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