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Modified Hot-Zone Design for Large Diameter 4H-SiC Single Crystal Growth

Author:
Choi, Jung Woo   Kim, Jung Gyu   Jang, Byung Kyu   Ko, Sang Ki   Kyun, Myung Ok   Seo, Jung Doo   Ku, Kap Ryeol   Choi, Jeong Min   Lee, Won Jae   


Journal:
Materials Science Forum


Issue Date:
2019


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