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Hetero-epitaxial growth of TiC films on MgO(001) at 100 degrees C by DC reactive magnetron sputtering

Author:
Braic, M.  Zoita, N. C.  Danila, M.  Grigorescu, C. E. A.  Logofatu, C.  


Journal:
THIN SOLID FILMS


Issue Date:
2015


Abstract(summary):

Hetero-epitaxial TiC thin films were deposited at 100 degrees C on MgO(001) by DC reactive magnetron sputtering in a mixture of Ar and CH4. The 62 nm thick films were analyzed for elemental composition and chemical bonding by Auger electron spectroscopy, X-ray photoelectron spectroscopy and micro-Raman spectroscopy. The crystallographic structure investigation by high resolution X-ray diffraction revealed that the films consist of two layers: an interface partially strained epilayer with high crystalline quality, and a relaxed layer, formed by columnar grains, maintaining the epitaxial relationship with the substrate. The films presented smooth surfaces (RMS roughness similar to 0.55 nm), with circular equi-sized grains/crystallites, as observed by atomic force microscopy. The Hall measurements in Van der Pauw geometry revealed relatively high resistivity value similar to 620 mu Omega cm, ascribed to electron scattering on interfaces, on grain boundaries and on different defects/dislocations. (C) 2015 Elsevier B.V. All rights reserved.


Page:
590---596


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