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Low-temperature, plasma assisted, cyclic synthesis of MoS\r 2

Author:
Perini, Christopher J.   Muller, Michael J.   Wagner, Brent K.   Vogel, Eric M.  


Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena


Issue Date:
2018


Page:
031201


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