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Soft X-ray and gamma-ray beam sources are developed by using laser and high-energy electron beams. Laser plasma soft X-ray source is a cryogenic Xe target irradiated by a high average power (>100 W) and high peak power (30 MW, 0.3 J/10 ns) laser. A conversion efficiency from the laser energy to the soft X-ray (70 to 200 eV) energy of 22% was achieved. Laser Compton gamma-ray source on a synchrotron radiation facility, New SUBARU, is a new quasi-monochromatic high-energy photon beam. The world's highest class gamma-ray flux of more than 106 photons/s is generated at a photon energy range of 6 to 17 MeV. © 2009 Wiley Periodicals, Inc. Electron Comm Jpn, 92(10): 13–23, 2009; Published online in Wiley InterScience ( www.interscience.wiley.com). DOI 10.1002/ecj.10134
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